MEM Analog Tunable Gratings by Electrostatic Actuation
نویسندگان
چکیده
منابع مشابه
MEMS Tunable Gratings with Analog Actuation
We have designed and fabricated tunable gratings with period tunable to within fraction of a nanometer. We actuated the gratings by electrostatic and piezoelectric means, and demonstrated period changes of order 1 nm. Fabrication processes for the two versions are presented. Devices characterization and experimental results are given for respective devices. 2002 Elsevier Science Inc. All rights...
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We have designed and fabricated tunable gratings with period tunable to within fraction of a micrometer. We actuated the gratings by electrostatic and piezoelectric means, and demonstrated period changes of order 1nm. Introduction Optical MEMS devices have included micro-mirrors [1, 2], tunable gratings, tunable Fabry-Perot resonators, etc. For example, Silicon Light Machines has commercialized...
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تاریخ انتشار 2002